any data on STS PECVD oxide polish rate...

Robert Huang roberth at
Fri Jul 2 14:04:17 PDT 2010

Hi fellow CMP users,

Just wondering if anyone has characterized the STS PECVD oxide polish rate with either the 2EX or S10 slurry.  If so, any information would be helpful.  If the data doesn't already exist, I plan to characterize early next week and would be glad to share my results if anyone is interested.

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