post-CMP clean...

Ed Myers edmyers at
Fri Feb 4 10:15:51 PST 2011


The Post-CMP scrubber next to the system has only been used a few 
times.  We did have one company which ran several groups of wafers 
through the system with favorable results.  These wafers had not been 
CMP'ed but had particulate problems from one of their other processes 
(outside of the SNF).  What we did find during that time was the 
quality of the clean was heavily depending on the conditioning of the 
brushes.  They were using the dirty brushes which reside in the 
system.  If we did not take them out and soak them for a day the 
process added scratches from local dry spots on the brush.

The most successful results I have heard, the lab members would keep 
their wafers wet.  They would do the wet bench scrub described by 
Robert, but would place the wafers in to a water bucket and transport 
the wafers to the decontamination bench.  This works for many samples 
but not all (Al is etched in DI water).

When the scrub track was purchased I looked for a combination cleaner 
with a megasonic's module.  They are out there, but not within our 
price limitations.


At 11:27 PM 2/3/2011, you wrote:
>Fellow CMP'ers:
>Have any of you looked at any other post-CMP cleans?  I have been 
>going the manual route using DI water rinse at the wetbench next to 
>the tool, brush scrub with the sponge (front and back-sides of the 
>wafer), back to DI rinse, then N2 dry.  I then follow the standard 
>KOH decontamination at wbsilicide.  However, when I do AFM after all 
>this, I still see indications of slurry particles on my wafers.  I'm 
>also concerned about any other residue, including metallics, that 
>may still be on my wafers.  If any of you have tried other post-CMP 
>cleans, I'd be very interested to hear your results and 
>experiences.  In addition, has anyone ever tried the automated clean 
>tool to the right of the tool?

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