From eldwin at stanford.edu Mon Aug 13 11:14:12 2012 From: eldwin at stanford.edu (Eldwin Ng) Date: Mon, 13 Aug 2012 11:14:12 -0700 Subject: cmp clean head request for thursday Message-ID: <502943F4.4010001@stanford.edu> Could we have the head changed to clean non-metal for this thursday afternoon 8/16? thanks, eldwin From zzp at stanford.edu Mon Aug 13 11:26:11 2012 From: zzp at stanford.edu (Zhiping Zhang) Date: Mon, 13 Aug 2012 11:26:11 -0700 (PDT) Subject: cmp clean head request for thursday In-Reply-To: <502943F4.4010001@stanford.edu> References: <502943F4.4010001@stanford.edu> Message-ID: <233C2E8A9B75485F96E16DFF6E365C77@stanford.edu> Can we do that only after my session on Wed.? I still need the gold-contaminated hardware till then. Thanks, Zhiping -----Original Message----- From: Eldwin Ng [mailto:eldwin at stanford.edu] Sent: Monday, August 13, 2012 11:14 AM To: cmp at snf.stanford.edu Subject: cmp clean head request for thursday Could we have the head changed to clean non-metal for this thursday afternoon 8/16? thanks, eldwin From edmyers at stanford.edu Fri Aug 17 13:58:04 2012 From: edmyers at stanford.edu (Ed Myers) Date: Fri, 17 Aug 2012 13:58:04 -0700 Subject: Dirty CMP System Message-ID: <502EB05C.6010906@stanford.edu> All, The attached pictures are from the hardware I removed this morning during change over. As you can see, the wafer carrier membrane is covered in slurry. All the dried slurry particles on the polishing pad came from the un-cleaned polishing head. I did not take pictures of all the slurry in the catch basin and on the platen. I want to remind everyone of the importance of cleaning the system. The lack of cleaning is a disqualification offense. 1st offense: 2 weeks off the tool and 3 month loss of hardware changing privilege. 2nd offense: 1 month and permanent loss of hardware changing privilege. 3rd offense: permanent disqualification. If anyone wants to discuss these terms please stop by my office. Regards, Ed -------------- next part -------------- A non-text attachment was scrubbed... Name: Membrane 8-17-12.JPG Type: image/jpeg Size: 381869 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Platten 8-17-12.JPG Type: image/jpeg Size: 356319 bytes Desc: not available URL: