From edmyers at stanford.edu Wed Mar 21 08:04:14 2012 From: edmyers at stanford.edu (Ed Myers) Date: Wed, 21 Mar 2012 08:04:14 -0700 Subject: Upgrade of CMP Polishing Heads Message-ID: <4F69EDEE.40301@stanford.edu> All, Those of you who are using the CMP have notice the high failure rate of our membranes. Talking with GnP they have a new head design. There recommendation is for us to modify the heads to be compatible with their current membrane design. This will require us to send the polishing heads back to Korea for the modification. I don't know how long the work will take, but I expect a few weeks. I will be sending out the first group of heads in early April. If you plan on using the system, please make sure we have the head with the correct cleanliness category. Regards, Ed From edmyers at stanford.edu Wed Mar 21 16:31:12 2012 From: edmyers at stanford.edu (Ed Myers) Date: Wed, 21 Mar 2012 16:31:12 -0700 Subject: Fwd: Comment cmp SNF 2012-03-21 16:27:06: Dirty Metal head1 broken In-Reply-To: <20120321232707.70BDC780E05@smtp-unencrypted.stanford.edu> References: <20120321232707.70BDC780E05@smtp-unencrypted.stanford.edu> Message-ID: <4F6A64C0.9090305@stanford.edu> We are down to 1 membrane. It appears to me, we might as well send in all the heads for modification. It will take as long to get new membranes as it will to get the heads modified. Ed -------- Original Message -------- Subject: Comment cmp SNF 2012-03-21 16:27:06: Dirty Metal head1 broken Date: Wed, 21 Mar 2012 16:27:07 -0700 From: joem at snf.stanford.edu To: cmp-pcs at snf.stanford.edu The Dirty Metal Head 1's retainer ring fell off. It was hanging down on my third wafer. I left the hardware to the right of the tool. Joe -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- An embedded and charset-unspecified text was scrubbed... Name: Attached Message Part URL: