Dead SunRays

[Mike Bell]

They should all be working now. Thanks for letting us know.

Mike

Brian Joseph Greene wrote:

> FYI,
>   There are currently two dead SunRays in the lithography area.  The one
> near the solvent bench is completely dead (may not even be plugged in)
> and the one where the Canon i-line stepper used to be is permanently
> hourglassed.
>
>   In addition there is another permanently hourglassed SunRay in the
> diffusion area across from wbdiff.
>
> -Brian