[Fwd: diff and litho shutdown]
rcrane at snf.stanford.edu
Wed Apr 7 15:49:32 PDT 2004
Bernard Hao-Chih Liu wrote:
> Hello,I have not used snf clean room for years, but I am still
> getting emails.If there a way to remove me?Thank you!
> Bernard Liu, Ph.D.
> Rapid Prototyping Lab
> Stanford University
> -----Original Message-----
> From: Dick Crane [mailto:rcrane at snf.stanford.edu]
> Sent: Wednesday, April 07, 2004 3:02 PM
> To: lab
> Subject: diff and litho shutdown
> There will be a major shutdown of the diffusion and litho
> areas on Saturday, April 17, from 0600 through 1800, for
> facilities and outside contractors to replace or repair vent
> fans and shutters.
> Diffusion and associated area: All toxic and flammable
> (except H2) gases will be turned off during a repair to the
> toxic gas bunker fan in CISX115. This action affects the
> following tools: Tylanbpsg, Tylannitride, Tylanpoly,
> Tylansige, Tystar1, ASM epi reactor, STS dep, and AG4108.
> This repair was attempted during the holiday shutdown, but
> an incorrectly sized custom part delayed the work.
> Litho: The solvent vent fan for litho is being repaired. All
> solvent vented tools must be shutdown. This action affects:
> Headway2, Laurel, svgcoat, svgcoat2, svgdev, svgdev2, bluem,
> litho solvent bench, and yes. This repair addresses a
> recently discovered, pending failure.
> I have reserved the affected tools in my name. I will send
> out and post an announcement when the work is complete and
> these areas are ready for use.
> Sorry for the inconvenience,
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