Thermco furnaces
Bill Murray
bmurray at snf.stanford.edu
Mon Jun 30 14:35:02 PDT 2003
Ted,
I need a couple of pieces of additional information for each piece of
equipment: a description and a location in the lab. For example,
the "cpd" description is 'Tousimis Critical Point Dryer' and the location
is 'L109'.
As soon as I get that information and John's approval of the equipment
names, I will add the four pieces of equipment.
Thanks,
Bill
On Mon, 30 Jun 2003, Ted Berg wrote:
> Coral associations
>
> Hi John,
> Items that should prevent the tubes from running:
> Burn box-brnbx6(new)-nitride and poly
> house gases-hh2-f3,hn2-f1,ho2-f2,uhp-n2-f5-tubes 1 and 2 oxides
> mda-f22-nitride and poly
> exhaust-exhsc-2-f68-all tubes
> NH3-nitride-f23
> DCS-nitride-f46
> PH3-Poly
> SiH4-Poly
> B2H6-Poly
>
> John,
> the Thermco furnaces are getting very close to operation-at least from
> my perspective. Could you please add the following ports/info to coral:
>
> in Furnaces:
> Thermox1 card 3 relay2 dataport-77
> Thermox2 card 3 relay3 dataport-78
> in LPCVD:
> ThermPoly1 card 3 relay4 dataport-79
> ThermNitr1 card 3 relay5 dataport-80
>
>
>
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