SVG coater changes

Uli Thumser uthumser at stanford.edu
Thu Mar 10 14:01:01 PST 2011


During the last winter shutdown, we've made some changes at the SVG 
coater tracks.
The resist for 3 um is now at track 1 and the resist for glass wafers at 
track 2.
Could you please change the Data Display for the Qualification?
The scroll down menu for the svgcoat should read now:
Resist type:
SPR 3612 1 micron
SPR 3612 1.6 microns
SPR 220-7 7 microns
SPR 220-3 microns
SPR 220-4 microns
Other (describe in comments)

svgcoat2
Resist type:
SPR 3612 1 micron
SPR 3612 1.6 microns
Shipley 3617m 1.6 microns
SPR 955 0.7 microns
SPR 955 1 micron
Other (describe in comments)

Thank you ,
Uli









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