SVG coater changes

John Shott shott at stanford.edu
Thu Mar 10 14:18:14 PST 2011


Uli:

Is it true that these changes should also be made in the other 
non-qualification recipes as well?

Thanks,

John


> During the last winter shutdown, we've made some changes at the SVG 
> coater tracks.
> The resist for 3 um is now at track 1 and the resist for glass wafers 
> at track 2.
> Could you please change the Data Display for the Qualification?
> The scroll down menu for the svgcoat should read now:
> Resist type:
> SPR 3612 1 micron
> SPR 3612 1.6 microns
> SPR 220-7 7 microns
> SPR 220-3 microns
> SPR 220-4 microns
> Other (describe in comments)
>
> svgcoat2
> Resist type:
> SPR 3612 1 micron
> SPR 3612 1.6 microns
> Shipley 3617m 1.6 microns
> SPR 955 0.7 microns
> SPR 955 1 micron
> Other (describe in comments)
>
> Thank you ,
> Uli
>



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