SVG coater changes

Uli Thumser uthumser at stanford.edu
Thu Mar 10 14:47:10 PST 2011


yes, I forgot, I just think about qualifications

On 3/10/2011 2:18 PM, John Shott wrote:
> Uli:
>
> Is it true that these changes should also be made in the other 
> non-qualification recipes as well?
>
> Thanks,
>
> John
>
>
>> During the last winter shutdown, we've made some changes at the SVG 
>> coater tracks.
>> The resist for 3 um is now at track 1 and the resist for glass wafers 
>> at track 2.
>> Could you please change the Data Display for the Qualification?
>> The scroll down menu for the svgcoat should read now:
>> Resist type:
>> SPR 3612 1 micron
>> SPR 3612 1.6 microns
>> SPR 220-7 7 microns
>> SPR 220-3 microns
>> SPR 220-4 microns
>> Other (describe in comments)
>>
>> svgcoat2
>> Resist type:
>> SPR 3612 1 micron
>> SPR 3612 1.6 microns
>> Shipley 3617m 1.6 microns
>> SPR 955 0.7 microns
>> SPR 955 1 micron
>> Other (describe in comments)
>>
>> Thank you ,
>> Uli
>>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: uthumser.vcf
Type: text/x-vcard
Size: 298 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/coral/attachments/20110310/a61ce3d9/attachment.vcf>


More information about the coral mailing list