From mislam at snf.stanford.edu  Sun Dec  2 20:25:19 2007
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Sun, 2 Dec 2007 20:25:19 -0800
Subject: Shutdown cpd SNF 2007-12-02 20:25:18: All LED started blinking during process
Message-ID: <mailman.158.1356281278.3549.cpd-pcs@snf.stanford.edu>

Shut down as per manual instruction. My wafer in the chamber. Please le me know before unloading.



From jhaydon at snf.stanford.edu  Mon Dec  3 14:53:15 2007
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Mon, 3 Dec 2007 14:53:15 -0800
Subject: Shutdown cpd SNF 2007-12-02 20:25:18: All LED started blinking during process
Message-ID: <mailman.159.1356281278.3549.cpd-pcs@snf.stanford.edu>

new bottle installed



From uli at snf.stanford.edu  Mon Dec 17 16:05:16 2007
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Mon, 17 Dec 2007 16:05:16 -0800
Subject: Shutdown cpd SNF 2007-12-17 16:05:15: co2 bottle empty
Message-ID: <mailman.160.1356281278.3549.cpd-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Tue Dec 18 08:25:08 2007
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Tue, 18 Dec 2007 08:25:08 -0800
Subject: Shutdown cpd SNF 2007-12-17 16:05:15: co2 bottle empty
Message-ID: <mailman.161.1356281278.3549.cpd-pcs@snf.stanford.edu>

new bottle installed