From sgchong at snf.stanford.edu Thu May 6 13:47:23 2010 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Thu, 6 May 2010 13:47:23 -0700 Subject: Shutdown cpd SNF 2010-05-06 13:47:22: low LCO2 Message-ID: From jhaydon at snf.stanford.edu Thu May 6 15:47:20 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 6 May 2010 15:47:20 -0700 Subject: Shutdown cpd SNF 2010-05-06 13:47:22: low LCO2 Message-ID: new bottle installed From sgchong at snf.stanford.edu Thu May 6 20:30:02 2010 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Thu, 6 May 2010 20:30:02 -0700 Subject: Problem cpd SNF 2010-05-06 20:30:02: Dummy wafers missing Message-ID: The wafer box with dummy wafers is missing. From uli at snf.stanford.edu Mon May 10 11:54:59 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Mon, 10 May 2010 11:54:59 -0700 Subject: Problem cpd SNF 2010-05-06 20:30:02: Dummy wafers missing Message-ID: Found box in litho area.