Comment cpd SNF 2012-05-07 15:14:20: run looks okay

wslee at snf.stanford.edu wslee at snf.stanford.edu
Mon May 7 15:14:21 PDT 2012


Previous user reported that chips were not dry following cpd and noted in the logbook that only 1lb of CO2 was used instead of ~5lbs. The bottle weight was within the 30lbs of a new bottle.
CO2 bottle was replaced and I ran the tool with a blank Si wafer inside. Wafer came out dry and 4lb of CO2 was used.




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