System shutdown

Arash Hazeghi ahazeghi at
Mon Jul 7 20:32:16 PDT 2008

I have identified two issues with the system upon testing today

1) two of the arms have lost electrical connection

2) the roughing pump has issues and thus the oil diffusion into the chamber

I am contacting technical support for Varian to figure how we can fix  
the pump, until the pump and the electrical connections are fixed  
system will be shutdown.



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