From rcrane at snf.stanford.edu Fri Aug 2 09:26:08 2002 From: rcrane at snf.stanford.edu (Dick Crane) Date: Fri, 02 Aug 2002 09:26:08 -0700 Subject: [Fwd: Morning report] Message-ID: <3D4AB29F.69AF1D6A@snf.stanford.edu> Ray Seymour wrote: > > Date: 8/2/2002 > Tube Name/Number Status Comments > Tylan 1 Up > Tylan 2 UP > Tylan 3 Up > Tylan 4 Up > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-Dirty Ox Up > Tylan 8-SiGe Up Ran calibration routine to temp. > control 4.84/?? > Tylan 9-Poly Up 24.2/30 ?? Not updated in log > Tylan 10-Nitride yellow Not passing leak check first time > 6.7/30 > Tylan 11-BPSG-LTO down Clean completed waiting for testing > Tylan 12-FGA Up > Tystar Up 6.6/30?? Not updated in log > Doped Poly Down > TEOS yellow TEOS changed yesterday > Tylan 16 N/A > Burn Box Up > > GAAS 22 UP > GAAS 23 UP > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 5 07:06:51 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 05 Aug 2002 07:06:51 -0700 Subject: Daily Report 080502 Message-ID: <3D4E867B.C077FCF0@snf.stanford.edu> Greetings All, Date: 7/26/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Down temp issues -we are looking into it-SiH4 Cylinder Change 4.8/??? Tylan 9-Poly Down Sih4 Cylinder Change 27.6/30 Tylan 10-Nitride Down Sih4 Cylinder Change 8.4/30 Tylan 11-BPSG-LTO Down Sih4 Cylinder Change 26.7/30 Tylan 12-FGA Up Tystar Up 6.5/30 Doped Poly Down TEOS yellow TEOS Flow Issues Tylan 16 N/A Burn Box up GAAS 22 UP GAAS 23 UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 5 07:14:44 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 05 Aug 2002 07:14:44 -0700 Subject: Poly Pull and clean Message-ID: <3D4E8854.518C8F86@snf.stanford.edu> Since Poly is over27 microns and will be down for 24 hours anyway because of the cylinder change we are going to do a pull and clean. SiH4 dropped from120 psi on Thursday to 95 PSI on Friday to Empty over the Weekend. Poly put on 3 micron, LTO 6 microns and Nitride 1.6. Sorry for lack of notice .ted From tberg at snf.stanford.edu Tue Aug 6 07:23:33 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 06 Aug 2002 07:23:33 -0700 Subject: Daily Update 80602 Message-ID: <3D4FDBE5.38F5480E@snf.stanford.edu> Here You Go, Silane is back on . Poly is in final phase of clean so it should be back soon. TEOS injector changed yesterday, waiting. Date: 8/5/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up temp issues -Temp has been re-calibrated need input 4.8/??? Tylan 9-Poly Down Pull and Clean in work 27.6/30 Tylan 10-Nitride Up 8.4/30 Tylan 11-BPSG-LTO Up 26.7/30 Tylan 12-FGA Up Tystar Up 6.5/30??? Doped Poly Down TEOS yellow TEOS Flow Issues Injector changed Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Aug 7 07:12:43 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 07 Aug 2002 07:12:43 -0700 Subject: Daily Update 080702 Message-ID: <3D512ADB.A15E080C@snf.stanford.edu> Good Morning, Date: 8/7/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 4.8/??? Tylan 9-Poly Up Pull and Clean completed yesterday 1.0/30 Tylan 10-Nitride Up 9.9/30 Tylan 11-BPSG-LTO Up 8.8/30 Tylan 12-FGA Up Tystar Up 6.5/30??? Doped Poly Down TEOS yellow TEOS Flow Issues Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Aug 8 06:58:34 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 08 Aug 2002 06:58:34 -0700 Subject: Daily Update 80702 Message-ID: <3D527909.5CB17C8F@snf.stanford.edu> Good Morning, Note: All the way at the end of the report is this mornings Silane Pressure reading. This is the Silane that feeds the Tylans: Poly, LTO, Tystar, SiGe Date: 8/8/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 4.8/??? Tylan 9-Poly Up 1.3/30 Tylan 10-Nitride Up 10.85/30 Tylan 11-BPSG-LTO Up 10.4/30 Tylan 12-FGA Up Tystar Up 9.2/30??? Doped Poly Down TEOS yellow TEOS Flow Issues-Changed TEOS cannister yesterday Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently-700 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Aug 9 06:34:02 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 09 Aug 2002 06:34:02 -0700 Subject: Daily Update 80902 Message-ID: <3D53C4C9.CB17C860@snf.stanford.edu> Here you go, Note: Current SiH4 reading at end of report. TEOS cannister changed now it is wonderful. Why didn't it work with the last container?? Date: 8/9/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 4.8/??? Tylan 9-Poly Up 3.4/30 Tylan 10-Nitride Up 11.5/30 Tylan 11-BPSG-LTO Up 10.4/30 Tylan 12-FGA Up Tystar Up 9.2/30??? Doped Poly Down TEOS yellow TEOS Thickness OK with new cannister-waiting for feedback from Schumacher Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently-710 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 12 07:29:54 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 12 Aug 2002 07:29:54 -0700 Subject: Daily Update 81202 Message-ID: <3D57C662.826AC1E6@snf.stanford.edu> Morning all, Note: TC Sheath on Nitride was broken-that is why it did not pump down. It has been replaced and is pumping down. Date: 8/12/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.0/??? Tylan 9-Poly Up 5.6/30 Tylan 10-Nitride Up Had Broken TC Sheath-replaced pumping down 13.5/30 Tylan 11-BPSG-LTO Up 13.5/30 Tylan 12-FGA Up Tystar Up 9.3/30??? Doped Poly Down TEOS yellow TEOS Thickness OK with new cannister-waiting for feedback from Schumacher Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently-695 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Aug 13 06:44:13 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 13 Aug 2002 06:44:13 -0700 Subject: Daily Status 8/10/02 Message-ID: <3D590D2D.B96FE277@snf.stanford.edu> Good morning all, Note: Source zone TC was repaired on Tylan5 yesterday and injector was changed onTylan4.. Questionable TEOS sent back for analysis. SiH4 pressure at end of report. Date: 8/10/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow Lower thickness than expected-changed injector, checked temp and flows Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.0/??? Tylan 9-Poly Up 8.1/30 Tylan 10-Nitride Up 14.15/30 Tylan 11-BPSG-LTO Up 16.6/30 Tylan 12-FGA Up Tystar Up 10.1/30??? Doped Poly Down TEOS yellow TEOS Thickness OK with new cannister-waiting for feedback from Schumacher Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently-670 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Aug 14 07:02:40 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 14 Aug 2002 07:02:40 -0700 Subject: Daily Update 8/14/02 Message-ID: <3D5A6300.FEBC4BE3@snf.stanford.edu> Here you go, Tylan 4 back after torch change. Still waiting input from Schumacher on TEOS. Date: 8/14/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Thickness ok Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.0/??? Tylan 9-Poly Up 8.1/30 Tylan 10-Nitride Up 16/30 Tylan 11-BPSG-LTO Up 17.4/30 Tylan 12-FGA Up Tystar Up 10.4/30??? Doped Poly Down TEOS yellow TEOS Thickness OK with new cannister-waiting for feedback from Schumacher Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 665 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Aug 15 06:46:49 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 15 Aug 2002 06:46:49 -0700 Subject: Daily Update 8/15/02 Message-ID: <3D5BB0C9.CD4EB075@snf.stanford.edu> Here you go, Remember daily silane pressures are at the end of the report. Date: 8/15/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.0/??? Tylan 9-Poly Up 8.1/30 Tylan 10-Nitride Up 16.45/30 Tylan 11-BPSG-LTO Up 21.64/30 Tylan 12-FGA Up Tystar Up 10.5/30??? Doped Poly Down TEOS yellow TEOS Thickness OK with new cannister-waiting for feedback from Schumacher Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Aug 16 06:39:49 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 16 Aug 2002 06:39:49 -0700 Subject: Daily Update 8/16/02 Message-ID: <3D5D00A5.23486509@snf.stanford.edu> Here you are, Date: 8/16/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.2/??? Tylan 9-Poly Up 8.7/30 Tylan 10-Nitride Up 17.11/30 Tylan 11-BPSG-LTO Up 23.55/30 Tylan 12-FGA Up Tystar Up 10.5/30??? Doped Poly Down TEOS yellow TEOS Thickness OK with new cannister-Schumacher has canister and will check it out Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 19 06:57:00 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 19 Aug 2002 06:57:00 -0700 Subject: Daily Update 8/19/02 Message-ID: <3D60F92C.3B8CB621@snf.stanford.edu> Here you go, Note:LTO/BPSG will be going down eithertomorrow or Wednesday it is at 28.5 microns,please plan accordingly. SiH4 pressure is at the botom of report. Date: 8/19/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.2/??? Tylan 9-Poly Up 10.52/30 Tylan 10-Nitride Up 17.43/30 Tylan 11-BPSG-LTO Up 28.55/30 Tylan 12-FGA Up Tystar Up 10.5/30??? Doped Poly Down TEOS yellow TEOS Thickness OK with new cannister-Schumacher has canister and will check it out Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 620 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Aug 20 06:37:37 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 20 Aug 2002 06:37:37 -0700 Subject: Daily Update 8/20/02 Message-ID: <3D624621.40B4B6B9@snf.stanford.edu> Here you go, Date: 8/20/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.2/??? Tylan 9-Poly Up 11.2/30 Tylan 10-Nitride Up 17.94/30 Tylan 11-BPSG-LTO Down Pull and Clean 0/30 Tylan 12-FGA Up Tystar Up 10.7/30??? Doped Poly Down TEOS yellow TEOS Thickness OK with new cannister-Schumacher has canister and will check it out Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 615 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Aug 21 06:58:00 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 21 Aug 2002 06:58:00 -0700 Subject: Daily Update 8/21/02 Message-ID: <3D639C68.A98402ED@snf.stanford.edu> Here you go folks, Remember SiH4 pressure is at the end of the report. BPSG is re-assembled and should be back for testing by afternoon. Date: 8/21/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.2/??? Tylan 9-Poly Up 11.3/30 Tylan 10-Nitride Up 19.35/30 Tylan 11-BPSG-LTO Down Pull and Clean in progress 0/30 Tylan 12-FGA Up Tystar Up 10.7/30??? Doped Poly Down TEOS yellow TEOS Thickness OK with new cannister-Schumacher has canister and will check it out Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Aug 22 06:47:56 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 22 Aug 2002 06:47:56 -0700 Subject: Daily Update 8/22/02 Message-ID: <3D64EB8C.5DAA08CD@snf.stanford.edu> Good morning all, Note: Feedback from Schumacher says TEOS was really TEOS but one of the dip tube ports was loose causing a leak, thus causing a low dep. It should be ok to run. BPSG needs a test after pull and clean. Yes we noticed the pressure did not dropon the SiH4. Burn box was cleaned by Ray last night at 6:30pm. Date: 8/22/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.2/??? Tylan 9-Poly Up 11.3/30 Tylan 10-Nitride Up 20.1/30 Tylan 11-BPSG-LTO Down Pull and Clean-Completd needs test 0/30 Tylan 12-FGA Up Tystar Up 11.2/30??? Doped Poly Down TEOS yellow TEOS Thickness OK -Schumacher says it was TEOS but had a leak Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Aug 23 06:44:17 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 23 Aug 2002 06:44:17 -0700 Subject: Daily Update 8/23/02 Message-ID: <3D663C30.EF768972@snf.stanford.edu> Here you go, Date: 8/23/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.2/??? Tylan 9-Poly Up 11.3/30 Tylan 10-Nitride Up 20.1/30 Tylan 11-BPSG-LTO yellow Pull and Clean-test completed waiting results 0/30 Tylan 12-FGA Up Tystar Up 11.2/30??? Doped Poly Down TEOS yellow TEOS Thickness OK -Schumacher says it was TEOS but had a leak Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 26 06:41:14 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 26 Aug 2002 06:41:14 -0700 Subject: Daily Update 8/26/02 Message-ID: <3D6A2FF9.5D3280F5@snf.stanford.edu> Good Morning All, Note:SiH4 reading at end of report. Both BPSG and Tystar ran a bunch over the weekend. Date: 8/26/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.2/??? Tylan 9-Poly Up 14.0/30 Tylan 10-Nitride Up 22.3/30 Tylan 11-BPSG-LTO yellow Pull and Clean-test completed waiting results 6.5/30 Tylan 12-FGA Up Tystar Up 15.4/30??? Doped Poly Down TEOS yellow TEOS Thickness OK -Schumacher says it was TEOS but had a leak Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 520 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Aug 27 06:34:34 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 27 Aug 2002 06:34:34 -0700 Subject: Daily Update 8/27/02 Message-ID: <3D6B7FEA.72B6C73F@snf.stanford.edu> Here you go, Date: 8/27/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.2/??? Tylan 9-Poly Up 16.6/30 Tylan 10-Nitride Up 22.3/30 Tylan 11-BPSG-LTO Down Pull and Clean-broken injector port 0/30 Tylan 12-FGA Up Tystar Up 15.4/30??? Doped Poly Down TEOS yellow TEOS Thickness OK - Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 520 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Aug 28 07:33:31 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 28 Aug 2002 07:33:31 -0700 Subject: Daily report 8/28/02 Message-ID: <3D6CDF3B.A6A9CB70@snf.stanford.edu> Here you go, Note on Tylan bank: Ray has changed the injector and flex line on tylan 2 and is inspecting the others. Date: 8/28/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 yellow H2 fault during new TCA recipe-replaced Injector Tylan 3 Down H2 leak problem during new TCA recipe Tylan 4 yellow H2 fault during new TCA recipe Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.2/??? Tylan 9-Poly Up 16.6/30 Tylan 10-Nitride Up 22.3/30 Tylan 11-BPSG-LTO Up Pull and Clean completed-broken injector port .5/30 Tylan 12-FGA Up Tystar Up 15.4/30??? Doped Poly Down TEOS yellow TEOS Thickness OK - Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 520 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Aug 29 07:36:53 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 29 Aug 2002 07:36:53 -0700 Subject: Daily Update 8/29/02 Message-ID: <3D6E3185.D210300F@snf.stanford.edu> Here you go, Note: Tylan 1 is being cleaned and reinstalled. Tylans 2-4 are restricted-no stem for now. SiH4 si at 510Psi. Date: 8/29/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Down Tube Clean Tylan 2 yellow No Steam Ox Tylan 3 yellow No Steam Ox Tylan 4 yellow No Steam Ox Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.2/??? Tylan 9-Poly Up 17.2/30 Tylan 10-Nitride Up 22.5/30 Tylan 11-BPSG-LTO Up 5.2/30 Tylan 12-FGA Up Tystar Up 15.4/30??? Doped Poly Down TEOS yellow TEOS Thickness OK - Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 510 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Aug 30 08:36:34 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 30 Aug 2002 08:36:34 -0700 Subject: Daily report 8/30/02 Message-ID: <3D6F9102.640175D1@snf.stanford.edu> Greetings all, The burn box was cleaned this morning, TCA saga continues, Leak rate checked on BPSG and it is fine. Date: 8/30/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow Tube pulled and cleaned-Jim did steam ox investigating TCA Tylan 2 yellow TCA Investigation Tylan 3 yellow TCA Investigation Tylan 4 yellow TCA Investigation Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up Waiting for feedback on Temp 5.2/??? Tylan 9-Poly Up 19.4/30 Tylan 10-Nitride Up 22.5/30 Tylan 11-BPSG-LTO Up 6.2/30 Tylan 12-FGA Up Tystar Up 18.4/30??? Doped Poly Down TEOS yellow TEOS Thickness OK - Tylan 16 N/A Burn Box Up Cleaned this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 500 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: