Daily Report 080502

Ted Berg tberg at snf.stanford.edu
Mon Aug 5 07:06:51 PDT 2002


Greetings All,


Date: 7/26/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Down temp issues -we are looking into it-SiH4 Cylinder
Change 4.8/???
Tylan 9-Poly Down Sih4 Cylinder Change 27.6/30
Tylan 10-Nitride Down Sih4 Cylinder Change 8.4/30
Tylan 11-BPSG-LTO Down Sih4 Cylinder Change 26.7/30
Tylan 12-FGA Up
Tystar Up  6.5/30
Doped Poly Down
TEOS yellow TEOS Flow Issues
Tylan 16 N/A
Burn Box  up

GAAS 22 UP
GAAS 23 UP

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