Poly Pull and clean

Ted Berg tberg at snf.stanford.edu
Mon Aug 5 07:14:44 PDT 2002


Since Poly is over27 microns and will be down for 24 hours anyway
because of the cylinder change we are going to do a pull and clean.
    SiH4 dropped from120 psi on Thursday to 95 PSI on Friday to Empty
over the Weekend. Poly put on 3 micron, LTO 6 microns and Nitride 1.6.
Sorry for  lack of notice .ted




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