Daily Update 80602

Ted Berg tberg at snf.stanford.edu
Tue Aug 6 07:23:33 PDT 2002

Here You Go,

Silane is back on .  Poly is in final phase of clean so it should be
back soon.   TEOS injector changed yesterday, waiting.

Date: 8/5/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up temp issues -Temp has been re-calibrated need input
Tylan 9-Poly Down Pull and Clean in work 27.6/30
Tylan 10-Nitride Up  8.4/30
Tylan 11-BPSG-LTO Up  26.7/30
Tylan 12-FGA Up
Tystar Up  6.5/30???
Doped Poly Down
TEOS yellow TEOS Flow Issues Injector changed
Tylan 16 N/A
Burn Box Up


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