Daily Update 080702

Ted Berg tberg at snf.stanford.edu
Wed Aug 7 07:12:43 PDT 2002


Good Morning,


Date: 8/7/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 4.8/???
Tylan 9-Poly Up Pull and Clean completed yesterday 1.0/30
Tylan 10-Nitride Up  9.9/30
Tylan 11-BPSG-LTO Up  8.8/30
Tylan 12-FGA Up
Tystar Up  6.5/30???
Doped Poly Down
TEOS yellow TEOS Flow Issues
Tylan 16 N/A
Burn Box Up

GAAS 22 UP
GAAS 23 UP

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