Daily Update 80702

Ted Berg tberg at snf.stanford.edu
Thu Aug 8 06:58:34 PDT 2002

Good Morning,
Note:  All the way at the end of the report is this mornings Silane
Pressure reading.  This is the Silane that feeds the Tylans: Poly, LTO,
Tystar, SiGe

Date: 8/8/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 4.8/???
Tylan 9-Poly Up  1.3/30
Tylan 10-Nitride Up  10.85/30
Tylan 11-BPSG-LTO Up  10.4/30
Tylan 12-FGA Up
Tystar Up  9.2/30???
Doped Poly Down
TEOS yellow TEOS Flow Issues-Changed TEOS cannister yesterday
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI       Currently-700 PSI

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