Daily Update 80902

Ted Berg tberg at snf.stanford.edu
Fri Aug 9 06:34:02 PDT 2002

Here you go,

Note: Current SiH4 reading at end of report.  TEOS cannister changed now
it is wonderful.  Why didn't it work with the last container??

Date: 8/9/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 4.8/???
Tylan 9-Poly Up  3.4/30
Tylan 10-Nitride Up  11.5/30
Tylan 11-BPSG-LTO Up  10.4/30
Tylan 12-FGA Up
Tystar Up  9.2/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK with new cannister-waiting for feedback
from Schumacher
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI Currently-710 PSI

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