Daily Update 81202
tberg at snf.stanford.edu
Mon Aug 12 07:29:54 PDT 2002
Note: TC Sheath on Nitride was broken-that is why it did not pump
down. It has been replaced and is pumping down.
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.0/???
Tylan 9-Poly Up 5.6/30
Tylan 10-Nitride Up Had Broken TC Sheath-replaced pumping down 13.5/30
Tylan 11-BPSG-LTO Up 13.5/30
Tylan 12-FGA Up
Tystar Up 9.3/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK with new cannister-waiting for feedback
Tylan 16 N/A
Burn Box Up
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Change at 100PSI Currently-695 PSI
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