Daily Status 8/10/02

Ted Berg tberg at snf.stanford.edu
Tue Aug 13 06:44:13 PDT 2002

Good morning all,

Note:  Source zone TC was repaired on Tylan5 yesterday and injector was
changed onTylan4.. Questionable TEOS sent back for analysis.  SiH4
pressure at end of report.

Date: 8/10/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 yellow Lower thickness than expected-changed injector, checked
temp and flows
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.0/???
Tylan 9-Poly Up  8.1/30
Tylan 10-Nitride Up  14.15/30
Tylan 11-BPSG-LTO Up  16.6/30
Tylan 12-FGA Up
Tystar Up  10.1/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK with new cannister-waiting for feedback
from Schumacher
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI Currently-670 PSI

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