Daily Update 8/14/02

Ted Berg tberg at snf.stanford.edu
Wed Aug 14 07:02:40 PDT 2002

Here you go,
    Tylan 4 back after torch change.  Still waiting input from
Schumacher on TEOS.

Date: 8/14/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up Thickness ok
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.0/???
Tylan 9-Poly Up  8.1/30
Tylan 10-Nitride Up  16/30
Tylan 11-BPSG-LTO Up  17.4/30
Tylan 12-FGA Up
Tystar Up  10.4/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK with new cannister-waiting for feedback
from Schumacher
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI Currently 665 PSI

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