Daily Update 8/15/02

Ted Berg tberg at snf.stanford.edu
Thu Aug 15 06:46:49 PDT 2002


Here you go,

Remember daily silane pressures are at the end of the report.


Date: 8/15/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.0/???
Tylan 9-Poly Up  8.1/30
Tylan 10-Nitride Up  16.45/30
Tylan 11-BPSG-LTO Up  21.64/30
Tylan 12-FGA Up
Tystar Up  10.5/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK with new cannister-waiting for feedback
from Schumacher
Tylan 16 N/A
Burn Box Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 660 PSI

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