Daily Update 8/19/02

Ted Berg tberg at snf.stanford.edu
Mon Aug 19 06:57:00 PDT 2002

Here you go,

Note:LTO/BPSG will be going down eithertomorrow or Wednesday it is at
28.5 microns,please plan accordingly.  SiH4 pressure is at the botom of

Date: 8/19/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.2/???
Tylan 9-Poly Up  10.52/30
Tylan 10-Nitride Up  17.43/30
Tylan 11-BPSG-LTO Up  28.55/30
Tylan 12-FGA Up
Tystar Up  10.5/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK with new cannister-Schumacher has canister
and will check it out
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI Currently 620 PSI

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