Daily Update 8/21/02

Ted Berg tberg at snf.stanford.edu
Wed Aug 21 06:58:00 PDT 2002

Here you go folks,

Remember SiH4 pressure is at the end of the report.  BPSG is
re-assembled and should be back for testing by afternoon.

Date: 8/21/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.2/???
Tylan 9-Poly Up  11.3/30
Tylan 10-Nitride Up  19.35/30
Tylan 11-BPSG-LTO Down Pull and Clean in progress 0/30
Tylan 12-FGA Up
Tystar Up  10.7/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK with new cannister-Schumacher has canister
and will check it out
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI Currently 600 PSI

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