Daily Update 8/22/02
tberg at snf.stanford.edu
Thu Aug 22 06:47:56 PDT 2002
Good morning all,
Note: Feedback from Schumacher says TEOS was really TEOS but one of the
dip tube ports was loose causing a leak, thus causing a low dep. It
should be ok to run. BPSG needs a test after pull and clean. Yes we
noticed the pressure did not dropon the SiH4. Burn box was cleaned by
Ray last night at 6:30pm.
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.2/???
Tylan 9-Poly Up 11.3/30
Tylan 10-Nitride Up 20.1/30
Tylan 11-BPSG-LTO Down Pull and Clean-Completd needs test 0/30
Tylan 12-FGA Up
Tystar Up 11.2/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK -Schumacher says it was TEOS but had a
Tylan 16 N/A
Burn Box Up
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Change at 100PSI Currently 600 PSI
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