Daily Update 8/23/02

Ted Berg tberg at snf.stanford.edu
Fri Aug 23 06:44:17 PDT 2002


Here you go,


Date: 8/23/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.2/???
Tylan 9-Poly Up  11.3/30
Tylan 10-Nitride Up  20.1/30
Tylan 11-BPSG-LTO yellow Pull and Clean-test completed waiting results
0/30
Tylan 12-FGA Up
Tystar Up  11.2/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK -Schumacher says it was TEOS but had a
leak
Tylan 16 N/A
Burn Box Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 600 PSI

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