Daily Update 8/26/02

Ted Berg tberg at snf.stanford.edu
Mon Aug 26 06:41:14 PDT 2002


Good Morning All,

Note:SiH4 reading at end of report.   Both BPSG and Tystar ran a bunch
over the weekend.


Date: 8/26/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.2/???
Tylan 9-Poly Up  14.0/30
Tylan 10-Nitride Up  22.3/30
Tylan 11-BPSG-LTO yellow Pull and Clean-test completed waiting results
6.5/30
Tylan 12-FGA Up
Tystar Up  15.4/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK -Schumacher says it was TEOS but had a
leak
Tylan 16 N/A
Burn Box Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 520 PSI

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