Daily Update 8/27/02

Ted Berg tberg at snf.stanford.edu
Tue Aug 27 06:34:34 PDT 2002

Here you go,

Date: 8/27/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.2/???
Tylan 9-Poly Up  16.6/30
Tylan 10-Nitride Up  22.3/30
Tylan 11-BPSG-LTO Down Pull and Clean-broken injector port 0/30
Tylan 12-FGA Up
Tystar Up  15.4/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK -
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI Currently 520 PSI

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