Daily report 8/28/02
tberg at snf.stanford.edu
Wed Aug 28 07:33:31 PDT 2002
Here you go,
Note on Tylan bank: Ray has changed the injector and flex line on
tylan 2 and is inspecting the others.
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 yellow H2 fault during new TCA recipe-replaced Injector
Tylan 3 Down H2 leak problem during new TCA recipe
Tylan 4 yellow H2 fault during new TCA recipe
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.2/???
Tylan 9-Poly Up 16.6/30
Tylan 10-Nitride Up 22.3/30
Tylan 11-BPSG-LTO Up Pull and Clean completed-broken injector port .5/30
Tylan 12-FGA Up
Tystar Up 15.4/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK -
Tylan 16 N/A
Burn Box Up
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Change at 100PSI Currently 520 PSI
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