Daily Update 8/29/02

Ted Berg tberg at snf.stanford.edu
Thu Aug 29 07:36:53 PDT 2002

Here you go,

Note:  Tylan 1 is being cleaned and reinstalled.  Tylans 2-4 are
restricted-no stem for now.  SiH4 si at 510Psi.

Date: 8/29/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Down Tube Clean
Tylan 2 yellow No Steam Ox
Tylan 3 yellow No Steam Ox
Tylan 4 yellow No Steam Ox
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.2/???
Tylan 9-Poly Up  17.2/30
Tylan 10-Nitride Up  22.5/30
Tylan 11-BPSG-LTO Up  5.2/30
Tylan 12-FGA Up
Tystar Up  15.4/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK -
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI Currently 510 PSI

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