Daily report 8/30/02
tberg at snf.stanford.edu
Fri Aug 30 08:36:34 PDT 2002
The burn box was cleaned this morning, TCA saga continues, Leak rate
checked on BPSG and it is fine.
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 yellow Tube pulled and cleaned-Jim did steam ox investigating
Tylan 2 yellow TCA Investigation
Tylan 3 yellow TCA Investigation
Tylan 4 yellow TCA Investigation
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up Waiting for feedback on Temp 5.2/???
Tylan 9-Poly Up 19.4/30
Tylan 10-Nitride Up 22.5/30
Tylan 11-BPSG-LTO Up 6.2/30
Tylan 12-FGA Up
Tystar Up 18.4/30???
Doped Poly Down
TEOS yellow TEOS Thickness OK -
Tylan 16 N/A
Burn Box Up Cleaned this morning
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Change at 100PSI Currently 500 PSI
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