From tberg at snf.stanford.edu Mon Dec 2 07:07:54 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 02 Dec 2002 07:07:54 -0800 Subject: Diffusion Morning Report 12/02/02 Message-ID: <3DEB7749.307FDEB5@snf.stanford.edu> Here you go, Epi Burnbox sump is dead, looking into it, poly down for pull and clean, burn box down for clean, bad lamp on Epi., Bank 4 down for bad breaker, NItride getting close to Pull and clean Date: 12/2/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly 0/30 Tylan 10-Nitride Up 21/30 Tylan 11-BPSG-LTO Up 3.2/30 Tylan 12-FGA Up Tystar Down Temperature check 13.25/30??? Doped Poly Down TEOS-down Tylan 16 N/A Burn Box Pressure +1- Cleaning this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @420 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Dec 3 07:12:34 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 03 Dec 2002 07:12:34 -0800 Subject: Diffusion Morning report 12/03/02 Message-ID: <3DECC9E2.62B9EC63@snf.stanford.edu> Good Morning all, Poly is up after pull and clean, burn box was ok this morning, still working on Epi sump issue-pump ordered. Date: 12/3/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up Pull and clean completed 0/30 Tylan 10-Nitride Up 21/30 Tylan 11-BPSG-LTO Up 3.0/30 Tylan 12-FGA Up Tystar Down Temperature check 13.25/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box OK GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @400 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Dec 4 06:49:16 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 04 Dec 2002 06:49:16 -0800 Subject: Diffusion Morning Meeting 12/04/02 Message-ID: <3DEE15EC.DCA48FDC@snf.stanford.edu> Here you go, Still working on epi sump, pump has been replaced -re assembling. Burn box OK no Nitride run last night. Date: 12/4/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up Pull and clean completed .34/30 Tylan 10-Nitride Up 21/30 Tylan 11-BPSG-LTO Up 3.0/30 Tylan 12-FGA Up Tystar Up Temperature check 13.25/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box OK GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @400 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Dec 5 06:47:02 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 05 Dec 2002 06:47:02 -0800 Subject: Diffusion Morning Report 12/05/02 Message-ID: <3DEF66E6.F75A61D7@snf.stanford.edu> Good Morning all, Epi Sump pump replaced waiting for level sensor, Burn Box ok.Trans-LC ordered per Jim (new materials committee). Date: 12/5/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up 1.94/30 Tylan 10-Nitride Up 21/30 Tylan 11-BPSG-LTO Up 3.42/30 Tylan 12-FGA Up Tystar Up Temperature check 13.25/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box OK GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @400 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Dec 6 07:17:41 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 06 Dec 2002 07:17:41 -0800 Subject: Diffusion Morning report 12/06/02 Message-ID: <3DF0BF95.B1F286C4@snf.stanford.edu> Good Morning all, Burn box looked ok but we are checking for the weekend. Bubbler mod in progress. Date: 12/6/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up 2.1/30 Tylan 10-Nitride Up 21/30 Tylan 11-BPSG-LTO Up 6.1/30 Tylan 12-FGA Up Tystar Up 13.25/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box OK Checking this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @400 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Dec 9 07:15:21 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 09 Dec 2002 07:15:21 -0800 Subject: Diffusion Morning Report 12/09/02 Message-ID: <3DF4B389.1D12C96E@snf.stanford.edu> Here you go, Burn box cleaning, Nitride, MFS 460 alarm, Bubbler mod in process Date: 12/9/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up 2.7/30 Tylan 10-Nitride yellow MFS Alarm 21.8/30 Tylan 11-BPSG-LTO Up 7.75/30 Tylan 12-FGA Up Tystar Up 16.25/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box High Pressure Cleaning this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @390 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Dec 10 06:54:51 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 10 Dec 2002 06:54:51 -0800 Subject: Diffusion Morning Report 12/10/02 Message-ID: <3DF6003B.927BEC4F@snf.stanford.edu> Good Morning all, Everything looks pretty good, Burn box ok Epi lift station seems to be working. Diffusion Date: 12/10/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up 2.87/30 Tylan 10-Nitride Up 21.8/30 Tylan 11-BPSG-LTO Up 7.75/30 Tylan 12-FGA Up Tystar Up 16.4/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @390 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Dec 11 07:27:42 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 11 Dec 2002 07:27:42 -0800 Subject: Diffusion Morning report Message-ID: <3DF7596D.E08FEE6D@snf.stanford.edu> Good Morning all, Burn box high-cleaned, Trans-LC controller completed and checked out. Diffusion Date: 12/11/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up 3.6/30 Tylan 10-Nitride Up 22.9/30 Tylan 11-BPSG-LTO Up 8.56/30 Tylan 12-FGA Up Tystar Up 16.5/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box High-cleaned this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @380 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Dec 12 06:47:57 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 12 Dec 2002 06:47:57 -0800 Subject: Diffusion Morning Report 12/12/02 Message-ID: <3DF8A19D.9101C73C@snf.stanford.edu> Here you go Folks, FGA door closed not sensed, LTO injectors repositioned waiting results, Trans-LC is here waiting instructions, MFC for nitride Back fill ordered. Diffusion Date: 12/12/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up 3.6/30 Tylan 10-Nitride Up 23.6/30 Tylan 11-BPSG-LTO Up 10.65/30 Tylan 12-FGA Down not sensing door closed Tystar Up 16.5/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @375 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Dec 13 07:05:00 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 13 Dec 2002 07:05:00 -0800 Subject: Diffusion Morning Report 12/13/02 Message-ID: <3DF9F71C.BEA9EA17@snf.stanford.edu> Good Morning all, Tylan 4-should it go green?? Tylan 6 door interlock indicator. ZYGO is now with us. Burn box was OK but we checked it for the weekend. Diffusion Date: 12/13/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow Possible Uniformity issue Tylan 5-BBr3 Up Tylan 6-POCl3 yellow Door interlock issue Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up 3.6/30 Tylan 10-Nitride Up 24.6/30 Tylan 11-BPSG-LTO Up 12/30 Tylan 12-FGA Up Tystar Up 16.5/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up Looking into CD rw to transfer Data GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @375 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Dec 16 08:03:08 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 16 Dec 2002 08:03:08 -0800 Subject: Diffusion Morning report 12/16/02 Message-ID: <3DFDF93C.E34AEA4F@snf.stanford.edu> Good mornig all, Tylan 2 is being replaced, Tylan Nitride has had soft pump replaced and N2 backfill MFC is being replaced. Burn box was cleaned this morning. Diffusion Date: 12/16/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow Possible uniformity issue Tylan 2 Down Melted O-Ring inside tube-replacing the tube Tylan 3 Up Tylan 4 yellow Possible Uniformity issue Tylan 5-BBr3 Up Tylan 6-POCl3 yellow Door interlock issue Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up 10.6/30 Tylan 10-Nitride Down won't vent-rerplaced soft pump valve 28.3/30 Tylan 11-BPSG-LTO Up 15.24/30 Tylan 12-FGA Up Tystar Up 16.5/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up Ordered CD RW and Memory upgrade GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @375 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Dec 17 06:49:21 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 17 Dec 2002 06:49:21 -0800 Subject: Diffusion Morning report 12/17/02 Message-ID: <3DFF3970.1E6E6C3B@snf.stanford.edu> Morning all, Burn box high+2-cleaning this morning. What is happening with Tylan 1 and 2?? Nitride is at 30 don't know if we will make it to Friday?? Diffusion Date: 12/17/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow Possible uniformity issue Tylan 2 Down tube replaced-testing?? Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up 11.3/30 Tylan 10-Nitride Up running until shutdown unless it dies 30/30 Tylan 11-BPSG-LTO Up 16.9/30 Tylan 12-FGA Up Tystar Up 16.5/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up Ordered CD RW and Memory upgrade GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @340 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Dec 18 06:53:37 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 18 Dec 2002 06:53:37 -0800 Subject: Diffusion Morning Report Message-ID: <3E008BF1.38EE2A7F@snf.stanford.edu> Good Morning all, Burn box ok this morning, Tylan 1 and 2 questionable uniformity. Message to Jim M. about Trans-LC. Diffusion Date: 12/18/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow Possible uniformity issue Tylan 2 Down tube replaced-testing??Bad Uniformity Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up 14.3/30 Tylan 10-Nitride Up running until shutdown unless it dies 30.25/30 Tylan 11-BPSG-LTO Up 18.4/30 Tylan 12-FGA Up Tystar Up 16.5/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up Installed Winzip and winSCP for file transfer. GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @320 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Dec 19 07:12:06 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 19 Dec 2002 07:12:06 -0800 Subject: Diffusion Morning report 12/19/02 Message-ID: <3E01E1C6.9B557E7E@snf.stanford.edu> Good morning all, Tylan 1 down bad uniformity, burn box OK. Countdown to turn-off. Diffusion Date: 12/19/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Down Possible uniformity issue Tylan 2 Up tube replaced-Uniformity OK Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up 14.4/30 Tylan 10-Nitride Up running until shutdown unless it dies 31.5/30 Tylan 11-BPSG-LTO Up 18.4/30 Tylan 12-FGA Up Tystar Up 16.5/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up Ordered CD RW and Memory upgrade GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @320 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Dec 20 08:14:03 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 20 Dec 2002 08:14:03 -0800 Subject: Diffusion Morning Report 12/20/02 Message-ID: <3E0341CB.7C109FB4@snf.stanford.edu> Good morning all, Everything was up before it went down. Purging gases, Nitride pull and clean, all the other stuff in process. Have a happy holiday see you all after the first. Diffusion Date: 12/20/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up uniformity ok Tylan 2 Up tube replaced-Uniformity OK Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.75? Tylan 9-Poly up 14.4/30 Tylan 10-Nitride Up running until shutdown 0/30 Tylan 11-BPSG-LTO Up 18.4/30 Tylan 12-FGA Up Tystar Up 16.5/30??? Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up Ordered CD RW and Memory upgrade GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @320 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: