Diffusion Morning Report 12/02/02

Ted Berg tberg at snf.stanford.edu
Mon Dec 2 07:07:54 PST 2002

Here you go,
 Epi Burnbox sump is dead, looking into it, poly down for pull and
clean,  burn box down for clean, bad lamp on Epi., Bank 4 down for bad
breaker, NItride getting close to Pull and clean

Date: 12/2/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly    0/30
Tylan 10-Nitride Up   21/30
Tylan 11-BPSG-LTO Up   3.2/30
Tylan 12-FGA Up
Tystar Down Temperature check 13.25/30???
Doped Poly Down
Tylan 16 N/A
Burn Box Pressure +1- Cleaning this morning


SiH4 for furnaces   Change at 100PSI  Currently @420 PSI

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