Diffusion Morning report 12/03/02

Ted Berg tberg at snf.stanford.edu
Tue Dec 3 07:12:34 PST 2002

Good Morning all,

Poly is up after pull and clean, burn box was ok this morning, still
working on Epi sump issue-pump ordered.

Date: 12/3/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up Pull and clean completed 0/30
Tylan 10-Nitride Up   21/30
Tylan 11-BPSG-LTO Up   3.0/30
Tylan 12-FGA Up
Tystar Down Temperature check 13.25/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box OK


SiH4 for furnaces   Change at 100PSI  Currently @400 PSI

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20021203/6f3e3c00/attachment.html>

More information about the diffusion mailing list