Diffusion Morning Meeting 12/04/02

Ted Berg tberg at snf.stanford.edu
Wed Dec 4 06:49:16 PST 2002

Here you go,

    Still working on epi sump, pump has been replaced -re assembling.
Burn box OK no Nitride run last night.

Date: 12/4/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up Pull and clean completed .34/30
Tylan 10-Nitride Up   21/30
Tylan 11-BPSG-LTO Up   3.0/30
Tylan 12-FGA Up
Tystar Up Temperature check 13.25/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box OK


SiH4 for furnaces   Change at 100PSI  Currently @400 PSI

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