Diffusion Morning Report 12/05/02

Ted Berg tberg at snf.stanford.edu
Thu Dec 5 06:47:02 PST 2002


Good Morning all,
    Epi Sump pump replaced waiting for level sensor, Burn Box
ok.Trans-LC ordered per Jim (new materials committee).


Date: 12/5/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up   1.94/30
Tylan 10-Nitride Up   21/30
Tylan 11-BPSG-LTO Up   3.42/30
Tylan 12-FGA Up
Tystar Up Temperature check 13.25/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box OK

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @400 PSI


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