Diffusion Morning report 12/06/02

Ted Berg tberg at snf.stanford.edu
Fri Dec 6 07:17:41 PST 2002

Good Morning all,

    Burn box looked ok but we are checking for the weekend. Bubbler mod
in progress.

Date: 12/6/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up   2.1/30
Tylan 10-Nitride Up   21/30
Tylan 11-BPSG-LTO Up   6.1/30
Tylan 12-FGA Up
Tystar Up  13.25/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box OK Checking this morning


SiH4 for furnaces   Change at 100PSI  Currently @400 PSI

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