Diffusion Morning Report 12/09/02

Ted Berg tberg at snf.stanford.edu
Mon Dec 9 07:15:21 PST 2002


Here you go,
    Burn box cleaning,  Nitride, MFS 460 alarm, Bubbler mod in process


Date: 12/9/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up   2.7/30
Tylan 10-Nitride yellow MFS Alarm 21.8/30
Tylan 11-BPSG-LTO Up   7.75/30
Tylan 12-FGA Up
Tystar Up  16.25/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box High Pressure Cleaning this morning

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @390 PSI

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