Diffusion Morning Report 12/10/02

Ted Berg tberg at snf.stanford.edu
Tue Dec 10 06:54:51 PST 2002

Good Morning all,
    Everything looks pretty good, Burn box ok Epi lift station seems to
be working.

Diffusion Date: 12/10/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up   2.87/30
Tylan 10-Nitride Up  21.8/30
Tylan 11-BPSG-LTO Up   7.75/30
Tylan 12-FGA Up
Tystar Up  16.4/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI  Currently @390 PSI

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