Diffusion Morning report

Ted Berg tberg at snf.stanford.edu
Wed Dec 11 07:27:42 PST 2002


Good Morning all,
    Burn box high-cleaned, Trans-LC controller completed and checked
out.

Diffusion Date: 12/11/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up   3.6/30
Tylan 10-Nitride Up  22.9/30
Tylan 11-BPSG-LTO Up   8.56/30
Tylan 12-FGA Up
Tystar Up  16.5/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box High-cleaned this morning

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @380 PSI

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