Diffusion Morning Report 12/12/02

Ted Berg tberg at snf.stanford.edu
Thu Dec 12 06:47:57 PST 2002


Here you go Folks,
    FGA door closed not sensed, LTO injectors repositioned waiting
results, Trans-LC is here waiting instructions, MFC for nitride Back
fill ordered.

Diffusion Date: 12/12/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up   3.6/30
Tylan 10-Nitride Up  23.6/30
Tylan 11-BPSG-LTO Up   10.65/30
Tylan 12-FGA Down not sensing door closed
Tystar Up  16.5/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @375 PSI

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