Diffusion Morning Report 12/13/02

Ted Berg tberg at snf.stanford.edu
Fri Dec 13 07:05:00 PST 2002

Good Morning all,
    Tylan 4-should it go green?? Tylan 6 door interlock indicator.  ZYGO
is now with us. Burn box was OK but we checked it for the weekend.

Diffusion Date: 12/13/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 yellow Possible Uniformity issue
Tylan 5-BBr3 Up
Tylan 6-POCl3 yellow Door interlock issue
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up   3.6/30
Tylan 10-Nitride Up  24.6/30
Tylan 11-BPSG-LTO Up   12/30
Tylan 12-FGA Up
Tystar Up  16.5/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up Looking into CD rw to transfer Data


SiH4 for furnaces   Change at 100PSI  Currently @375 PSI

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