Diffusion Morning report 12/16/02

Ted Berg tberg at snf.stanford.edu
Mon Dec 16 08:03:08 PST 2002

Good mornig all,

    Tylan 2 is being replaced, Tylan Nitride has had soft pump replaced
and N2 backfill MFC is being replaced. Burn box was cleaned this

Diffusion Date: 12/16/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 yellow Possible uniformity issue
Tylan 2 Down Melted O-Ring inside tube-replacing the tube
Tylan 3 Up
Tylan 4 yellow Possible Uniformity issue
Tylan 5-BBr3 Up
Tylan 6-POCl3 yellow Door interlock issue
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up   10.6/30
Tylan 10-Nitride Down won't vent-rerplaced soft pump valve 28.3/30
Tylan 11-BPSG-LTO Up   15.24/30
Tylan 12-FGA Up
Tystar Up 16.5/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up Cleaned this morning
ZYGO Up Ordered CD RW and Memory upgrade


SiH4 for furnaces   Change at 100PSI  Currently @375 PSI

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