Diffusion Morning report 12/17/02

Ted Berg tberg at snf.stanford.edu
Tue Dec 17 06:49:21 PST 2002

Morning all,
    Burn box high+2-cleaning this morning.  What is happening with Tylan
1 and 2?? Nitride is at 30 don't know if we will make it to Friday??

Diffusion Date: 12/17/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 yellow Possible uniformity issue
Tylan 2 Down tube replaced-testing??
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up   11.3/30
Tylan 10-Nitride Up running until shutdown unless it dies 30/30
Tylan 11-BPSG-LTO Up   16.9/30
Tylan 12-FGA Up
Tystar Up  16.5/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up Cleaned this morning
ZYGO Up Ordered CD RW and Memory upgrade


SiH4 for furnaces   Change at 100PSI  Currently @340 PSI

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