Diffusion Morning Report

Ted Berg tberg at snf.stanford.edu
Wed Dec 18 06:53:37 PST 2002

Good Morning all,

    Burn box ok this morning, Tylan 1 and 2 questionable uniformity.
Message to Jim M. about Trans-LC.

Diffusion Date: 12/18/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 yellow Possible uniformity issue
Tylan 2 Down tube replaced-testing??Bad Uniformity
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up   14.3/30
Tylan 10-Nitride Up running until shutdown unless it dies 30.25/30
Tylan 11-BPSG-LTO Up   18.4/30
Tylan 12-FGA Up
Tystar Up  16.5/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up Installed Winzip and winSCP for file transfer.


SiH4 for furnaces   Change at 100PSI  Currently @320 PSI

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