Diffusion Morning Report 12/20/02

Ted Berg tberg at snf.stanford.edu
Fri Dec 20 08:14:03 PST 2002

Good morning all,
    Everything was up before it went down.  Purging gases, Nitride pull
and clean, all the other stuff in process.  Have a happy holiday see you
all after the first.

Diffusion Date: 12/20/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up uniformity ok
Tylan 2 Up tube replaced-Uniformity OK
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.75?
Tylan 9-Poly up   14.4/30
Tylan 10-Nitride Up running until shutdown 0/30
Tylan 11-BPSG-LTO Up   18.4/30
Tylan 12-FGA Up
Tystar Up  16.5/30???
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up Ordered CD RW and Memory upgrade


SiH4 for furnaces   Change at 100PSI  Currently @320 PSI

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