Diffusion Morning Report 12/20/02
tberg at snf.stanford.edu
Fri Dec 20 08:14:03 PST 2002
Good morning all,
Everything was up before it went down. Purging gases, Nitride pull
and clean, all the other stuff in process. Have a happy holiday see you
all after the first.
Diffusion Date: 12/20/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up uniformity ok
Tylan 2 Up tube replaced-Uniformity OK
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up 6.75?
Tylan 9-Poly up 14.4/30
Tylan 10-Nitride Up running until shutdown 0/30
Tylan 11-BPSG-LTO Up 18.4/30
Tylan 12-FGA Up
Tystar Up 16.5/30???
Doped Poly Down
Tylan 16 N/A
Burn Box Up
ZYGO Up Ordered CD RW and Memory upgrade
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Change at 100PSI Currently @320 PSI
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