From tberg at snf.stanford.edu Fri Nov 1 06:51:14 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 01 Nov 2002 06:51:14 -0800 Subject: Diffusion Mourning Report 11/01/02 Message-ID: <3DC294E2.7977BACE@snf.stanford.edu> Here you go, Tylan 4 saga continues. LTO back to the way it was. Burn box down again for cleaning. Date: 11/1/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down pull and clean completed-TCA Clean completed- Testing Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 6.3/? Tylan 9-Poly Up 24.9/30 Tylan 10-Nitride Up 26.6/30 Tylan 11-BPSG-LTO yellow Ran Uniformity test yesterday- 7.48/30 Tylan 12-FGA Up Tystar Up 6.75/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Down cleaning again this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Nov 4 07:00:23 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 04 Nov 2002 07:00:23 -0800 Subject: Diffusion Morning Report 11/04/02 Message-ID: <3DC68B87.35560A0D@snf.stanford.edu> Good Morning all, Tylan 4's uniformity is back to normal, Nitride is going down at Noon today it is over 30 microns, Poly is close behind at 26 microns. Burn box being cleaned this morning. Date: 11/4/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down Testing Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 6.3/? Tylan 9-Poly Up 26.4/30 Tylan 10-Nitride Up 30.02/30 Going down for clean at noon. Tylan 11-BPSG-LTO yellow 10.75/30 Tylan 12-FGA Up Tystar Up 6.75/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Down cleaning again this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 590 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Nov 5 07:08:14 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 05 Nov 2002 07:08:14 -0800 Subject: Diffusion morning report 11/05/02 Message-ID: <3DC7DEDE.E1EACB78@snf.stanford.edu> Good Morning All, Pull and clean on Nitride ongoing. Tylan 4 yellow? Date: 11/5/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 yellow Uniformity issues-approximately 5% Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 6.3/? Tylan 9-Poly Up 26.6/30 Tylan 10-Nitride Down Pull and Clean 0/30 Tylan 11-BPSG-LTO yellow Uniformity issues 12.6/30 Tylan 12-FGA Up Tystar Up 6.75/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Nov 6 08:01:39 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 06 Nov 2002 08:01:39 -0800 Subject: Diffusion Morning report 11/06/02 Message-ID: <3DC93CE3.C42888B3@snf.stanford.edu> Here you go, Nitride Questions, Tylan1 down for plumbing replacement, Burn box OK Date: 11/6/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Down TCA Investigation-plumbing change Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 yellow Uniformity issues-approximately 5% Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 6.3/? Tylan 9-Poly Up 28.4/30 Tylan 10-Nitride Down Pull and Clean-uniformity issues 0/30 Tylan 11-BPSG-LTO yellow Uniformity issues 12.8/30 Tylan 12-FGA Up Tystar Up 6.75/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Nov 7 06:45:34 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 07 Nov 2002 06:45:34 -0800 Subject: Diffusion Morning Report 11/07/02 Message-ID: <3DCA7C8D.913C13B5@snf.stanford.edu> Here you go , Tylan 1 is back together and in TCA clean, Nitride has had coat ready for test, Poly is going down on Monday for pull and clean. Date: 11/7/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Down TCA Investigation-plumbing change-completed, tube changed,starting TCA clean Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 yellow Uniformity issues-approximately 5% Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 6.3/? Tylan 9-Poly Up 28.4/30 Tylan 10-Nitride Down Pull and Clean again-uniformity issues 0/30 Tylan 11-BPSG-LTO yellow Uniformity issues 13.22/30 Tylan 12-FGA Up Tystar Up 6.75/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From cmprn153369 at gm20.com Thu Nov 7 12:35:11 2002 From: cmprn153369 at gm20.com (USB-Drive@usbpros.com) Date: Thu, 7 Nov 2002 15:35:11 -0500 (EST) Subject: Fact or Fiction: You can carry ALL of your data in your pocket.. 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URL: From tberg at snf.stanford.edu Fri Nov 8 09:07:36 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 08 Nov 2002 09:07:36 -0800 Subject: Diffusion Morning report 11/08/02 Message-ID: <3DCBEF58.D5DCE268@snf.stanford.edu> Here you go, Several issues this morning: TCA on Tylan 7 has a small leak we are working on it., Nitride had a problem-checked no problem found. Tylan 5,6,8 back on they were turned off last night related to leak. Still don't know about tylan1 uniformity. Date: 11/8/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Down TCA Investigation-plumbing-completed, tube changed,TCA done,waiting test results Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 yellow Uniformity issues-approximately 5% Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 6.3/? Tylan 9-Poly Up 28.4/30 Tylan 10-Nitride yellow power fail problem .67/30 Tylan 11-BPSG-LTO yellow Uniformity issues 13.68/30 Tylan 12-FGA Up Tystar Up 6.75/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up Cleaned this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Nov 11 07:33:25 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 11 Nov 2002 07:33:25 -0800 Subject: Diffusion Morning Report 11/11/02 Message-ID: <3DCFCDC5.6C45DBB0@snf.stanford.edu> Here you go, Tylan 7 down for pull and clean, TCA update, and leak, Poly down for pull and clean, Burn box cleaned again this morning. Date: 11/11/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 yellow Uniformity issues-approximately 5% Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Down Pull and Clean-leak Tylan 8-SiGe up 6.3/? Tylan 9-Poly Down Pull and Clean 0/30 Tylan 10-Nitride yellow power fail problem 1.9/30 Tylan 11-BPSG-LTO yellow Uniformity issues 13.8/30 Tylan 12-FGA Up Tystar Up 6.75/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box up-cleaned this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Nov 12 08:04:29 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 12 Nov 2002 08:04:29 -0800 Subject: Diffusion Morning Report 11/12/02 Message-ID: <3DD1268D.38F131BB@snf.stanford.edu> Here you go folks, Poly pulled and cleaned don't know if its coated or tested yet. Tylan 7 is going back together. Burn box is very high pressure-tried a quick clean still high-when are we going to stop this process??? Date: 11/12/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 yellow Uniformity issues-approximately 5% Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Down Pull and Clean-leak Tylan 8-SiGe up 6.3/? Tylan 9-Poly Down Pull and Clean-completed waiting for process OK 0/30 Tylan 10-Nitride Up 5.3/30 Tylan 11-BPSG-LTO yellow Uniformity issues 14.1/30 Tylan 12-FGA Up Tystar Up 6.75/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box high pressure Partially Cleaned this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Nov 13 07:19:53 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 13 Nov 2002 07:19:53 -0800 Subject: Diffusion Morning Report 11/13/02 Message-ID: <3DD26D99.A4E5B94B@snf.stanford.edu> Here you go, Poly back up after pull and clean, Tylan 7 had TCA run no problems waiting test results, tylan 4 waiting test results, Burn box down for clean. Date: 11/13/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 yellow Uniformity issues-approximately 5% Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Down Pull and Clean completed, TCA ran OK-need test results Tylan 8-SiGe up 6.3/? Tylan 9-Poly Up .35/30 Tylan 10-Nitride Up 5.8/30 Tylan 11-BPSG-LTO yellow Uniformity issues 14.5/30 Tylan 12-FGA Up Tystar Up 6.75/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Cleaned this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Nov 14 08:08:48 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 14 Nov 2002 08:08:48 -0800 Subject: Diffusion Morning report 11/13/02 Message-ID: <3DD3CA90.1D8F0616@snf.stanford.edu> Here you go, Tylan 3 in process of pull and clean. Date: 11/14/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Down Pull and clean TCA Mod Tylan 4 yellow Uniformity issues-approximately 5% Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up 6.4? Tylan 9-Poly Up .54/30 Tylan 10-Nitride Up 5.8/30 Tylan 11-BPSG-LTO yellow Uniformity issues 14.5/30 Tylan 12-FGA Up Tystar Up 6.75/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 560 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Nov 15 07:32:20 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 15 Nov 2002 07:32:20 -0800 Subject: Diffusion Morning report 11/15/02 Message-ID: <3DD51384.D044815B@snf.stanford.edu> Here you go, Tylan 3 down for pull and Clean and TCA mod. Burn box cleaned for this weekend. Date: 11/15/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Down Pull and clean TCA Mod completed checking out temp now then TCA Tylan 4 yellow Uniformity issues-approximately 5% Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up 6.4? Tylan 9-Poly Up 11.6/30 Tylan 10-Nitride Up 7.6/30 Tylan 11-BPSG-LTO yellow Uniformity issues 16.1/30 Tylan 12-FGA Up Tystar Up 10.25/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up Cleaned this Morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 530 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Nov 18 07:06:34 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 18 Nov 2002 07:06:34 -0800 Subject: diffusion Morning Report 11/18/02 Message-ID: <3DD901FA.C13C2119@snf.stanford.edu> Here you go, Tylan 3 ready for test, LTO broken lid replaced, Burn box checked out even though it was -. Date: 11/18/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Down Pull and clean TCA Mod completed ,temp cal and TCA completed-needs test Tylan 4 yellow Uniformity issues-approximately 5% Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up 6.5? Tylan 9-Poly Up 16.9/30 Tylan 10-Nitride Up 8.23/30 Tylan 11-BPSG-LTO yellow Uniformity issues 16.1/30 Tylan 12-FGA Up Tystar Up 10.25/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up Cleaned this Morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 515 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Nov 19 06:47:33 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 19 Nov 2002 06:47:33 -0800 Subject: Diffusion Morning Report 11/19/02 Message-ID: <3DDA4F05.74D65381@snf.stanford.edu> Here you go, Tylan 3 back up after TCA stuff, Tylan4 damper closed test, Burn box high and they are running it. Date: 11/19/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Uniformity good Tylan 4 yellow Uniformity issues-approximately 5% Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up 6.5? Tylan 9-Poly Up 17.9/30 Tylan 10-Nitride Up 10.21/30 Tylan 11-BPSG-LTO yellow Uniformity issues 18.8/30 Tylan 12-FGA Up Tystar Up 10.25/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box HIGH Pressure GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 500 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Nov 20 07:21:40 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 20 Nov 2002 07:21:40 -0800 Subject: Diffusion Morning Report 11/20/02 Message-ID: <3DDBA884.82E55EE7@snf.stanford.edu> Here you Go, Burn box is high again, furnaces are OK. Date: 11/20/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Uniformity good Tylan 4 yellow Uniformity issues-approximately 5% Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up 6.5? Tylan 9-Poly Up 18.3/30 Tylan 10-Nitride Up 11.12/30 Tylan 11-BPSG-LTO yellow Uniformity issues 19.3/30 Tylan 12-FGA Up Tystar Up 13.1/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box HIGH Pressure Cleaning this Morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 500 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Nov 21 07:05:54 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 21 Nov 2002 07:05:54 -0800 Subject: Diffusion Morning Report 11/21/02 Message-ID: <3DDCF652.2C290551@snf.stanford.edu> Good Morning all, Dichlorosilane cylinder change this morning, check on Burn Box, TCA controller out on tylan 2( this only effects TCA cleans). Date: 11/21/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up 6.5? Tylan 9-Poly Up 18.3/30 Tylan 10-Nitride Up 11.9/30 Tylan 11-BPSG-LTO yellow Uniformity issues 22.2/30 Tylan 12-FGA Up Tystar Up 13.1/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box not too high-checking this Morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 500 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Nov 22 07:32:13 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 22 Nov 2002 07:32:13 -0800 Subject: Diffusion Morning Report 11/22/02 Message-ID: <3DDE4DFD.DD0E4F84@snf.stanford.edu> Good Morning all, Tylan 2s TCA controller seems to be working OK, Dichlorosilane seems to be holding after change, LTO will be going down next week for clean. Date: 11/21/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up 6.5? Tylan 9-Poly Up 18.3/30 Tylan 10-Nitride Up 11.9/30 Tylan 11-BPSG-LTO yellow Uniformity issues 24.2/30 Tylan 12-FGA Up Tystar Up 13.1/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Pressure OK Checking this Morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @490 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Nov 25 08:36:49 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 25 Nov 2002 08:36:49 -0800 Subject: Diffusion Morning Report 11/25/02 Message-ID: <3DE251A1.A6B2F09B@snf.stanford.edu> Good morning folks, Tylan BPSG had broken TC sheath that was replaced and it is back up for hopefully one more day, Burn box was cleaned this morning,TEOS down for boats and sled clean BPSG going down tomorrow for pull and clean. Date: 11/25/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe up 6.5? Tylan 9-Poly Up 20.6/30 Tylan 10-Nitride Up 17.2/30 Tylan 11-BPSG-LTO Up Broken TC sheath and cantilever sheath-replaced 25.6/30 Tylan 12-FGA Up Tystar Up 13.25/30??? Doped Poly Down TEOS Down Cleaning boats and sled Tylan 16 N/A Burn Box Pressure OK Cleaned this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @470 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Nov 26 07:32:20 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 26 Nov 2002 07:32:20 -0800 Subject: Diffusion Morning Report 11/26/02 Message-ID: <3DE39404.565DCBCA@snf.stanford.edu> here you go, BPSG down for pull and clean, SiGe cylinder change, Burn box clean. Date: 11/26/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Down 6.75? Tylan 9-Poly Up 20.6/30 Tylan 10-Nitride Up 18.1/30 Tylan 11-BPSG-LTO Down Pull and Clean 0/30 Tylan 12-FGA Up Tystar Up 13.25/30??? Doped Poly Down TEOS yellow Boats and sled cleaned Tylan 16 N/A Burn Box Pressure High Cleaning this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @460 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Nov 27 07:12:14 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 27 Nov 2002 07:12:14 -0800 Subject: Diffusion Morning report 11/27/02 Message-ID: <3DE4E0CD.C1AA929C@snf.stanford.edu> Happy Turkey all, Bpsg is cleaned and coated ready for test, Ge cylinder change is completed, Ray is going through temp learning procedure for Colby and Jim M. on TYstar. Date: 11/27/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up Cylinder Change completed 6.75? Tylan 9-Poly Up 23.1/30 Tylan 10-Nitride Up 18.8/30 Tylan 11-BPSG-LTO Down Pull and Clean-completed and coated 0/30 Tylan 12-FGA Up Tystar Down Temperature check 13.25/30??? Doped Poly Down TEOS yellow Boats and sled cleaned Tylan 16 N/A Burn Box Pressure OK Cleaning this morning for the weekend. GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @440 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: